Mar 28, 2024  
University of Alberta Calendar 2020-2021 
    
University of Alberta Calendar 2020-2021 [ARCHIVED CATALOG]

ECE 457 - Microfabrication and Devices


★ 4 (fi 8) (either term, 3-0-2) Microfabrication processes for CMOS, bipolar, MEMS, and microfluidics devices. Laboratory safety. Deposition processes of oxidation, evaporation and sputtering. Lithography, wet and dry etch, and device characterization. Note: Consent of Department required. Credit may be obtained in only one of ECE 457 or E E 457.