May 07, 2024  
University of Alberta Calendar 2021-2022 
    
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University of Alberta Calendar 2021-2022 [ARCHIVED CATALOG]

ECE 559 - Microfabrication and Nanofabrication Topics II

★ 3 (fi 6) (either term, 3-0-0) The fabrication process for microelectronics and MEMs applications. Overview of processing steps: silicon wafer material, oxidation, lithography, diffusion, etching and ion implantation, chemical and physical vapor deposition, metallization. Process model. Yield, packaging, and assembly.