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Nov 24, 2024
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University of Alberta Calendar 2021-2022 [ARCHIVED CATALOG]
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ECE 457 - Microfabrication and Devices
★ 4 (fi 8) (either term, 3-0-2) Microfabrication processes for CMOS, bipolar, MEMS, and microfluidics devices. Laboratory safety. Deposition processes of oxidation, evaporation and sputtering. Lithography, wet and dry etch, and device characterization. Note: Consent of Department required. Credit may be obtained in only one of ECE 457 or E E 457.
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