ECE 558 - Microfabrication and Nanofabrication Topics I

★ 3 (fi 6) (either term, 3-0-0) Vacuum principles: gas kinetics and flow, pumping speed theory, pumping methods, pressure, measurement, sorption processes, vacuum system design basics. Thin film growth by sputtering, evaporation and chemical techniques. Characterization and classification of optical, electrical and mechanical properties. Applications of thin films. Note: May not be taken for credit if credit has already been obtained in either E E 641 or 642.