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Apr 17, 2026
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University of Alberta Calendar 2017-2018 [ARCHIVED CALENDAR]
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MEC E 564 - Design and Simulation of Micro-Electromechanical Systems (MEMS)
★ 3 (fi 6) (either term or Spring/Summer, 3-0-0) Overview of micro-systems, common micro-systems and their working principles, mechanical modeling and simulation of MEMS, scaling laws in miniaturization, material for MEMS and micro-systems, mechanical design of micro devices, mechanical packaging of micro devices, overview on micro-systems fabrication processes. Corequisite: MEC E 563 or equivalent.
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