Dec 14, 2025  
University of Alberta Calendar 2022-2023 
    
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University of Alberta Calendar 2022-2023 [ARCHIVED CALENDAR]

ECE 658 - Microsensors and Microelectromechanical Systems

Course Career Graduate
Units 3
Approved Hours 3-0-0
Fee index 6
Faculty Engineering
Department Electrical & Computer Engg
Typically Offered either term

Description
Overview of Micromachining Technologies, Lumped Modeling and Energy Conserving Transducers, Review of Elasticity and Micromechanical Structures, Case Study : Piezoelectric Pressure Sensors, Case Study : Capacitive Accelerometers, Overview of Microfluidics, Case Study : PCR-on-a-chip systems.