Dec 14, 2025  
University of Alberta Calendar 2022-2023 
    
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University of Alberta Calendar 2022-2023 [ARCHIVED CALENDAR]

ECE 559 - Microfabrication and Nanofabrication Topics II

Course Career Graduate
Units 3
Approved Hours 3-0-0
Fee index 6
Faculty Engineering
Department Electrical & Computer Engg
Typically Offered either term

Description
The fabrication process for microelectronics and MEMs applications. Overview of processing steps: silicon wafer material, oxidation, lithography, diffusion, etching and ion implantation, chemical and physical vapor deposition, metallization. Process model. Yield, packaging, and assembly.