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May 19, 2025
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University of Alberta Calendar 2022-2023 [ARCHIVED CALENDAR]
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ECE 558 - Microfabrication and Nanofabrication Topics I
Course Career Graduate
Units 3
Approved Hours 3-0-0
Fee index 6
Faculty Engineering
Department Electrical & Computer Engg
Typically Offered either term
Description
Vacuum principles: gas kinetics and flow, pumping speed theory, pumping methods, pressure, measurement, sorption processes, vacuum system design basics. Thin film growth by sputtering, evaporation and chemical techniques. Characterization and classification of optical, electrical and mechanical properties. Applications of thin films. Note: May not be taken for credit if credit has already been obtained in either E E 641 or 642.
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