| |
Apr 23, 2024
|
|
|
|
|
University of Alberta Calendar 2022-2023 [ARCHIVED CATALOG]
|
ECE 457 - Microfabrication and Devices
Course Career Undergraduate
Units 4
Approved Hours 3-0-2
Fee index 8
Faculty Engineering
Department Electrical & Computer Engg
Typically Offered either term
Description
Microfabrication processes for CMOS, bipolar, MEMS, and microfluidics devices. Laboratory safety. Deposition processes of oxidation, evaporation and sputtering. Lithography, wet and dry etch, and device characterization. Note: Consent of Department required. Credit may be obtained in only one of ECE 457 or E E 457.
|
|